JPS6380846U - - Google Patents
Info
- Publication number
- JPS6380846U JPS6380846U JP17544086U JP17544086U JPS6380846U JP S6380846 U JPS6380846 U JP S6380846U JP 17544086 U JP17544086 U JP 17544086U JP 17544086 U JP17544086 U JP 17544086U JP S6380846 U JPS6380846 U JP S6380846U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- semiconductor wafer
- suction device
- heads
- suctions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17544086U JPH0341469Y2 (en]) | 1986-11-14 | 1986-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17544086U JPH0341469Y2 (en]) | 1986-11-14 | 1986-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6380846U true JPS6380846U (en]) | 1988-05-27 |
| JPH0341469Y2 JPH0341469Y2 (en]) | 1991-08-30 |
Family
ID=31114764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17544086U Expired JPH0341469Y2 (en]) | 1986-11-14 | 1986-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341469Y2 (en]) |
-
1986
- 1986-11-14 JP JP17544086U patent/JPH0341469Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0341469Y2 (en]) | 1991-08-30 |